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Beilstein J. Nanotechnol. 2019, 10, 1443–1451, doi:10.3762/bjnano.10.142
Figure 1: Illustration of the experimental deposition chamber. Top view, without cover. The chamber is closed...
Figure 2: Chamber cover after deposition. The shape of the chamber is outlined by the PTFE paste used for sea...
Figure 3: Samples in chamber during deposition, immediately before being taken out of the chamber. The glass ...
Figure 4: GIXRD of as-deposited samples with indexed reflections attributed to cubic LiH. GIXRD was performed...
Figure 5: Possible mechanism of the surface reactions.
Figure 6: Derivative Auger spectra confirming the presence of Li2O on the surface, acquired at two different ...
Figure 7: XPS spectra before Ar sputtering of a) Li 1s region, b) C 1s and c) O 1s region.
Figure 8: In situ QCM results, showing approximately 18 sALD cycles. The maxima and minima correspond to the ...
Figure 9: SEM of the Si/Pt sample surface after deposition and exposure to atmosphere. The large crystal seen...
Figure 10: SEM of a Si sample cleaved after deposition. The film thickness was estimated to be roughly 45 nm.
Figure 11: Growth curve obtained from spectroscopic ellipsometry. The thickness is relative to the SEM cross-s...